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XTC/3 Operating Manual
Shutter Delay Fail
(M only)
Shutter delay is enabled and the
rate deviation is greater than 5%
or 0.5 Å
of the desired rate for 60
seconds
When Start or Reset is done
If Stop on alarms is set to No, the unit
will give the error but will not do
anything else. It stays in Shutter
Delay and controls power to acquire
correct rate. If rate comes into
specified range, then the output is
cleared.
When Idle Ramp is entered
Computer Contl
(M only)
Set in remote commands Cleared through remote commands
Cruc Src 1 Bin
Cruc Src 1 BCD
(M only)
Cruc Src 2 Bin
Cruc Src 2 BCD
(M only)
When a Start is done
Output set and cleared to select
crucibles as binary (1 of 8) or
BCD
When a Start is done
Output set and cleared to select
crucibles as binary (1 of 8) or BCD
Table 3-3 Inputs
Input Function Description
Start
Detection of a falling edge effects a START if a layer is not already
running.
Stop
Detection of a falling edge effects a STOP.
End Deposit
Detection of a falling edge terminates the Deposit state just as if the
Final Thickness were achieved.
RW Sample Init
Detection of a falling edge initiates a RateWatcher sample if the film is
programmed for this feature.
RW Sample Inhib Application of a ground reference voltage maintains the RateWatcher
in the Hold condition.
XtalFail Inhibit Application of a ground reference voltage prohibits the closure of the
Crystal Fail Relay and the associated Stop.
Zero Thick Detection of a falling edge duplicates the front panel ZERO.
Soak 2 Hold Application of a ground reference voltage extends the SOAK 2 state
until the signal/closure is removed.
Cruc 1 Valid
(in XTC/3S, also
used for Source 2)
Application of a ground reference voltage from the crucible rotation
mechanism is used to signal that the proper crucible for Source 1 (or
2 in XTC/3S) has indexed into position and state sequencing may
proceed.
Table 3-2 Output states (continued)
Output Active Inactive
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