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5. A screen as shown in the following figure is displayed after the zeroing is successful.
Select [Done] to quit zeroing.
NOTE
If zeroing fails, other faults may occur on the EFCS flowmeter. In this case,
troubleshoot the EFCS flowmeter.
7.3.5.3 Common Failures and Recommended Actions
If zeroing fails, troubleshoot the failure as follows:
1. Disconnect the gas supply, empty the gas out of the machine (or adjust the flowmeter to
make the pressure gauge return to zero). Conduct zeroing again.
2. If the zeroing is successful, it is inferred that a mechanical fault occurs on the three-way
valve or the proportional valve is faulty. Replace the three-way valve and proportional
valve.
3. If the zeroing still fails, it is inferred that the Sensirion flow sensor or EFCS flowmeter
card is faulty. Replace the Sensirion flow sensor and EFCS flowmeter card for
verification.
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