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9.2.21 Remove Vaporizer Manifold
1. Open the service door.
2. Disconnect the pipes from the pipeline connected with the vaporizer manifold assembly.
3. Unscrew the four (4) screws, and remove the vaporizer manifold assembly.
9.2.22 Remove Gas Source Inlet Port Assembly
1. Remove the service door and rear cover plate.
2. Disconnect cables and pipeline which are connected with the gas source inlet port
assembly, and remove the plug.
3. Unscrew the two (2) screws fixing each gas source inlet port assembly.