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Chapter 4 Mx-Series Unit Description 4-
21
by the rack & pinion mechanism. A 6spindle modular head has Z1 ~ Z6
axes.
Z-Axis Motors
Each spindle is equipped with a motor to move along Z axis. Wherever
necessary, the motor of each spindle carries out acceleration or
deceleration.
R-Axis Motor
This motor is also called θ -axis motor and controls rotation of Z1~Z6
axes using three belts driven by one motor.
Z-Spring
Puts the nozzle in the up position upon power off to prevent damage of
the nozzle and component.
Limit Sensors
These sensors are used to set up/down limits of a head by hardware.
Specification <Table 4-4> summarizes the modular head specification
<Table 4-4> Head specification
Parameter
Modular Head
Precision Head
Positioning
Component
Range
Min Component Size
0603(0402)
0603(0402)
Max Component Size
□9mm Single FOV
□12mm Multiple
FOV
□32mm Single FOV
□50mm Multiple FOV
Min IC Pitch
0.3mm
Z axis
Driving Mechanism
Rack & Pinion
Average Acceleration
7g’s
Resolution
0.0034 mm
0.0030 mm
R-axis
(or θ -
axis)
Driving Mechanism
Belt
Directly driven by AC
Servo
Motor
Resolution
0.044 deg
0.0055 deg

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