Main SP Tables-3
System Maintenance Section 2-381 D146/D147/D148/D149/D150
003
Absolute Humidity ENG
[0.00 to 100.00 / 0.00 /
0.01g/m3/step]
Displays absolute humidity of environment sensor output.
3300 [RTP Pattern :Disp]
001
M/A(Latest):K *ENG
[0.000 to 1.000 / 0.000 /
0.001mg/cm2/step]
Displays latest RTP pattern sensor's deposit amount (K).
002
M/A(Latest):C *ENG
[0.000 to 1.000 / 0.000 /
0.001mg/cm2/step]
Displays latest RTP pattern sensor's deposit amount (C).
003
M/A(Latest):M *ENG
[0.000 to 1.000 / 0.000 /
0.001mg/cm2/step]
Displays latest RTP pattern sensor's deposit amount (M).
004
M/A(Latest):Y *ENG
[0.000 to 1.000 / 0.000 /
0.001mg/cm2/step]
Displays latest RTP pattern sensor's deposit amount (Y).
011
M/A(Target):K *ENG
[0.000 to 1.000 / 0.220 /
0.001mg/cm2/step]
Displays RTP pattern sensor's depositing target amount (K).
012
M/A(Target):C *ENG
[0.000 to 1.000 / 0.400 /
0.001mg/cm2/step]
Displays RTP pattern sensor's depositing target amount (C).
013
M/A(Target):M *ENG
[0.000 to 1.000 / 0.450 /
0.001mg/cm2/step]
Displays RTP pattern sensor's depositing target amount (M).
014
M/A(Target):Y *ENG
[0.000 to 1.000 / 0.400 /
0.001mg/cm2/step]
Displays RTP pattern sensor's depositing target amount (Y).