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1. Precautions during maintenance work
Replacing CPU-A
□ Restore the backed up E2PROM contents.
□ Upgrade the Flash ROM, if required.
Replacing RF PS Assy
□ Sensitive to static electricity. Take care.
□ Conduct tuning.
□ Adjust according to the RF power supply adjustment.
Replacing a turbo molecular pump (TMP)
□ Reset the TMP operating time.
Replacing a rotary pump (RP)
□ Reset the RP operating time.
Reference
Approximate Maintenance Plan (Units: months)
Item 3 6 9 12 15 18 21 24 27 30 33 36
RP oil * * * * * * * * * * * *
Clean ion-source * * * * * *
GC trap * * * * * *
GC molecular
sieve filter
* * *
RP overhaul * *
Clean lenses * *
Clean pre-rod * *
Detector *
IG *
PG *
TMP overhaul *
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