60
Problems when starting evacuation
5. No ready status after automatic start (cont.)
Check PG.
□ Does the PG value fluctuate?
The turbo molecular pump (TMP) does start above 300kPa.
If no leaks exist, the PG could be defective. See section 4.6 PCB Assy, Main
CTRL-A.
A discontinuity in the PG wiring causes an error message to be display and prevents
startup.
Check the TMP.
□ Is the TMP running?
A problem could exist in the MAIN POWER PCB or cable if the TMP does not run
although PG is less than 300Pa. −−> See section 4.4 Main Power Assy.
□ Has a TMP power supply error occurred?
The status LEDs can be seen by removing the sheet metal between the GC and MS.
If an error is displayed for TMP power supply, this indicates a problem with the TMP
or TMP power supply. Replace one of these and check the condition again.
Caution
The power supplies for the large TMP and small TMP are incompatible in early
GCMS-QP2010 models. Never swap the wiring for testing purposes or normal
operation will not be subsequently possible.
Hint
Evacuation system protective operations
(1) Start
Does the flow become READY within 3 minutes? No −−> error
(2) RP ON
Does the Pirani gauge drop below 300Pa within 5 minutes of turning on the rotary
pump (RP)? No −−> error
To Next Page
Loading...
Need help?
General
