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Unit Operation Checks
6. PCB ASSY, MAIN CTRL-A
Outline
MAIN CTRL-A generates the lens voltages, controls the solenoid valves, controls the
high-voltage supply, measures the vacuum with the Pirani gauge, and provides voltage
amplification functions for vacuum measurement using IG. It also functions as a relay
board between CPU-A and IS CTRL-A and DI CTRL-A.
Operation Check Method
If an abnormality occurs, follow the procedures below to check the operation of the MAIN
CTRL-A PCB to efficiently diagnose the problem.
Peak abnormality: Checks 1, 2, 3
Vacuum abnormality: 1, 4, 5
Caution
A voltage of C60VDC is supplied to the PCB. To avoid electric shocks or damage to
the assembly, touch only the points instructed.
1. Checking the supply voltages
Check the supply voltages. The supply voltages are as follows, when the chassis is
grounded:
CP10 +15V (normal range: +14.25 to +15.75VDC)
CP13 -15V (normal range: -14.25 to -15.75VDC)
CP14 +24V (normal range: +22.7 to +25.3VDC)
CP29 +60V (normal range: +57 to +68VDC)
CP32 -60V (normal range: -57 to -68VDC)
2. Checking the lens voltages
Set the lens voltages with the Peak Monitor and confirm the output voltages at the check pin.
The normal output voltage lies in the range: set voltage ±5%.
CP16 LENS1 output voltage
CP30 LENS 2 output voltage
CP18 LENS 3 output voltage
CP31 LENS 4 output voltage