63
Problems when starting evacuation
7. Loud noise
Check the source of the noise.
□ Source is RP?
Oil deteriorated, worn rotor −> Replace oil, overhaul
□ Source is TMP1?
Defective bearing, wear, damaged blades −−> Replace TMP.
□ Source is TMP2?
Defective bearing, wear, damaged blades −−> Replace TMP.
Hint
To determine between a noise source in TMP1 and TMP2, turn on just one of them.
A tool program
is needed to turn the turbo molecular pumps on and off individually.
To Next Page
Loading...
