3
Contents
CONTENTS...................................................................................................................................3
1. INSTALLATION.........................................................................................................................5
1. Checking Installation Conditions ...................................................................................6
2. Unpacking, Assembly, Installation ................................................................................. 8
3. Environment Settings, Start-up.................................................................................... 11
4. Leak Check, Auto-tuning .............................................................................................13
5. Auto-tuning ..................................................................................................................15
6. Qualitative Analysis (SCAN Mode) .............................................................................. 16
7. Quantitative Analysis (SIM Mode) ............................................................................... 18
8. S/N Measurements......................................................................................................19
9. Batch Processing, Report Printing, QA/QC................................................................. 20
10. Maintenance.............................................................................................................. 21
11. S/N Measurements CI MODE(OPTION).......................................................... 22
12.S/N Measurements NCI MODE(OPTION)........................................................ 23
13.Mass patern check Measurements DI MODE(OPTION) .................................. 24
2. MAINTENANCE...................................................................................................................... 25
1. MS Navigator .............................................................................................................. 26
2. Instrument Configuration............................................................................................. 28
3. Lens Unit.....................................................................................................................29
4. Interface Unit...............................................................................................................31
5. Valves..........................................................................................................................32
6. MS Filter Unit ..............................................................................................................33
7. Detector Unit ...............................................................................................................35
8. Turbo Molecular Pump ................................................................................................ 36
9. Main Power Unit.......................................................................................................... 37
10. GC Unit .....................................................................................................................38
11. Updating the Flash ROM ........................................................................................... 39
12. Backing Up and Restoring the E2PROM...................................................................42
13. Adjusting the RF PS Assy.......................................................................................... 47
3. TROUBLESHOOTING............................................................................................................ 53
1. MS does not turn on....................................................................................................54
2. Abnormal Status LEDs ................................................................................................ 55
3. Cannot connect to MS................................................................................................. 56