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Description of Parts
8. Turbo Molecular Pump
Two turbo molecular pumps (TMP), one for the ion-source unit exhaust (TW-300) and one
for the analyzer exhaust (TW-70), are connected to a single rotary pump (E2M1.5).
Removing the Turbo Molecular Pumps
1. Remove IS Cont PCB. Remove the IG tube.
2. Disconnect the TMP exhaust unit from the rotary pump. Loosen and remove the
clamp from the KF flange. The TMP1 flange is integral with the TMP body and can be
difficult to remove.
3. Disconnect the connector (power) from the power supply.
4. Remove the TMP fixing screws and remove the TMP.
5. Lower TMP1 to the top of the TMP power supply, slide it to the left (as seen from the
front), and remove it from the instrument.
6. Reverse this procedure to install the TMP.
Caution Ensure that no dust or dirt sticks to the O-ring at the top of the TMP.
(Purge with dry gas (He, N
2
) during installation.)
RP connection (TMP exhaust unit)
TMP fixing screws
(4 positions)
TMP1
(TW300)
TMP2
(TW70)
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