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(3) TMP ON
Does the Pirani gauge drop below 100Pa within 5 minutes of turning on the turbo
molecular pump (TMP)? No −−> error
Does TMP become READY within 5 minutes? No −> error
(4) Vacuum READY 30 seconds after both TMP become READY
The FAILURE status LED flashes red if evacuation stops automatically for
protection.
TMP and RP failures
Within warranty period: Contact the Quality Assurance Department or TS
.
Outside warranty period: Repaired by service company (at a fee).
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