75
Measure the voltage at Pin 5 of Connector g in the block diagram, relative to Pin 3.
(normal range: -22.7 to -25.3VDC)
If any abnormality is discovered in these voltages, check the switching power supply and
check the conductivity of the cable connections.
2. Checking the rotary pump (RP) ON/OFF control
Check RP1 and RP2 control using GCMSsolution.
Stop RP1 and RP2 using GCMSsolution. Disconnect the RP1 cable and RP2 cable from
the rear of the GCMS-QP2010. Measure the AC voltage
across L and N of the RP1 outlet
at the rear of the GCMS-QP2010 to confirm that the voltage is 0V. Then, turn on RP1 and
again measure the voltage across L and N of the RP1 outlet to confirm that it is equal to the
instrument supply voltage.
Next, check RP2. Measure the resistance
across Pins 1 and 2 of the RP2 outlet to confirm
that they are insulated. Then, turn on RP2 and measure the resistance again to confirm
that the resistance does not exceed 5Ω.
If any abnormality is discovered in these checks and the MAIN POWER ASSY wiring is
normal, replace PUMP CTRL-A (225-11350-91).
3. Checking turbo molecular pump (TMP) ON/OFF control and the READY signal
Check TMP1 and TMP2 control using GCMSsolution.
Stop the evacuation system, disconnect connectors h and i from TURBO DRIVE.S
(TW300) and TURBO DRIVE.S (TW70H), and conduct automatic startup. Check with
GCMSsolution that TMP 1 and TMP2 are on. Measure the resistance across Pins 1 and 2
of the Connectors h and i outlet to confirm that the resistance does not exceed 10Ω. A
resistance greater than 10Ω suggests a problem in a cable or in the PUMP-CTRL PCB
(225-11350-91).
Turn off TMP 1 and TMP2 using GCMSsolution and re-connect the connectors to their
correct positions. Now, turn on TMP 1 and TMP2 again using GCMSsolution and confirm
that the TURBO DRIVE.S green READY LED light continuously. (Flashing indicates not
ready.) The TURBO DRIVE.S green READY LED lit continuously but the GCMSsolution
indicating TURBO PUMP is NOT-READY suggests a problem in a cable (h, i, j) or in the
PUMP-CTRL PCB (225-11350-91).
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