2. Introducon
The units used in the manual c
onform to the SI internaonal system of units of
measurement where applicable US equivalent units of measurement are given. When
ow rates are specied, the abbreviaon ‘sccm’ is used to mean
standard cubic cenmetres per minute. This is a ow of 1 cm
3
min
-1
at an ambient
temperature of 0 °C and a pressure of 1013 mbar (1.013 x 10
5
Pa).
2.1 Overview
WARNING: SAFE EQUIPMENT USE
Risk of injury or damag
e to equipment. Improper use of the equipment can cause
damage to it or injury to people. The user is responsible for the safe operaon,
installaon and monitoring of the system.
WARNING: ELECTROLYTIC CAPACITORS
Risk of asphyxiaon. The driv
e contains electrolyc capacitors and, under certain
fault condions, may emit dangerous fumes. Ensure that the drive is operated in a
well-venlated area.
CAUTION: ELECTRICAL CONNECTIONS
Risk of damage t
o equipment. Do not aempt to separate the controller from the
pump since this will cause damage to the electrical connecons.
A nEXT pump has a turbomolecular pump with a permanently aached controller which
have drive electronics.
The controller controls the electrical supply to the pump with the excepon of standby
speed control. The controller has no manual controls and can be operated through the
logic interface only. To operate the nEXT pump, connect it to the customer control
equipment and power supply or use the manufacturer's TIC Turbo Instrument Controller
or TIC Turbo Controller.
The controller drives the brush-less d.c. motor in the pump. Three variants of the nEXT
pump are:
▪ The 'S' or 'Simplex' variant which has turbomolecular blades.
▪ The 'D' or 'Duplex' variant which has turbomolecular blades and a drag mechanism
that allo
ws operaon at higher backing pressures than the pure turbomolecular
pumps.
▪ The 'T' or 'Triplex' variant which has turbomolecular blades, a drag mechanism and
a regenerave mechanism. The regenerave stage gives the opon to ulise
'boost' mode.
An 'iD' or 'iT' interstage variant gives an interstage port between the turbomolecular
blades and drag mechanism. For SEM and TEM applicaons, an 'L' variant is available
which oers lower vibraon and stray magnec eld emissions.
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