Figure 11 Typical pumping system with a nEXT pump
1. Vacuum system 2. High-vacuum gauge
3. Vibraon damper 4. Inlet screen
5. nEXT pump 6. Backing valve
7. Vacuum gauge 8. Flexible bellows
9. Foreline trap 10. Rotary backing pump
11. Mist lter 12. V
ent valve
13. Alternave posion for vent valve 14. Air cooler
15. PRX purge restrictor 16. Regulated purge gas supply
17. WCX water cooler and connecons
1. Vacuum system 2. High-vacuum gauge
3. Vibraon damper 4. Inlet screen
5. nEXT pump 6. Backing valve
7. Vacuum gauge 8. Flexible bellows
9. Foreline trap 10. Rotary backing pump
11. Mist lter 12. Vent valve
13. Alternave posion for vent valve 14. Air cooler
15. PRX purge restrictor 16. Regulated purge gas supply
17. WCX water cooler and connecons
4.3.1 Inlet screen (installed on CF only)
WARNING: SHARP EDGES
Risk of injury
. Removal of the inlet screen will expose the risk of injury from sharp
edges.
CAUTION: INLET SCREEN
Risk of damage t
o equipment. The inlet screen prevents the contaminaon of the
pump. Do not remove the inlet screen unl the pump is prepared to be mounted
onto the system.
04/2022 - ©Edwards Limited
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