7. Maintenance
WARNING: PERSONAL PROTECTIVE EQUIPMENTS
Risk of injury
. When you remove the pump, make sure to use the personal protecve
equipment to prevent the damage from failed components and possible
accumulaon of hazardous material. Check that the pump is vented to atmosphere at
a safe temperature. Be careful from possible spillages, sharp edges and debris.
Removal of the pump inlet screen will expose the risk of injury from sharp edges.
WARNING: MAINTENANCE SAFETY
Allow the pump r
otor to stop before you disconnect the logic interface cable from the
power supply. Isolate other power sources. Remove the pump from the vacuum
system for maintenance or fault nding procedures.
7.1 Introducon
Instrucons for bearing maintenance and surface cleaning for the turbomolecular
vacuum pump are given in the secons that follows. The inlet screens, inlet strainer and
inlet ange seals are available as spares. Refer to Spares on page 97.
7.2 Bearing and oil cartridge maintenance
Replace the oil cartridge and oil-lubricated bearing when its service life ends. This is
approximately more than 17,500 hours for the oil cartridge and 35,000 hours for the
bearing.
When the oil cartridge or bearing are necessary to replace, we recommend to:
▪ send the pump to our Service Centre for a bearing or oil cartridge replacement.
▪ purchase an oil cartridge or bearing service kit and replace the bearing or oil
cartridg
e on-site.
Refer to Service on page 95.
7.3 Rotor life
The fague life of turbomolecular pump rotors is approximately 40,000 to 50,000 cycles.
As a precauonary measure, we recommend you to return the pumps for a major
service (rotor replacement) aer 20,000 cycles of acceleraon to full speed and back to
a stop, or aer ten years of use, whichever occurs rst.
04/2022 - ©Edwards Limited
Page 80B80000880_G
B80000880_G - Maintenance
To Next Page
Loading...
Need help?
General
