Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 121
8
MAINTENANCE
Referred
section
3.4.1 3.4.3
3.9
Instruction Manual
(A)
*1 The driver output stops and the rotor continues rotating by inertia.
It may take several hours to stop. To stop the STP pump quickly, close the vacuum valve at the
outlet port flange
and introduce gas from the purge port into the STP pump.
Table
36 - Error
messages after self test (continued)
Countermeasures
1. Set the ambient
temperature to 40 ºC (104 ºF) or less.
2. Remove obstacle from the
ventilation port.
1. When changing the cable
length, perform tuning.
2. Contact Service office.
1. Remove external vibration
so as not to transmit it to the STP pump.
2. Check the vacuum piping. 3. Install the STP
pump in a
way that no foreign matter falls into the S
TP pump.
Contact Service office.
Contact Service office.
Contact Service office.
Probable causes
1. High ambient temperature. 2. Insufficient cooling of the
SCU-801.
Abnormal magnetic bearing: 1. Change of the cable
length.
2. Disconnection of the STP
connection cable or control circuit error.
Excessive vibration applied externally to the STP
pump:
1. External vibration/impact. 2. Atmospheric air flows into
the STP
pump.
3. Foreign matter falls into the
STP pump.
Failure of the SCU
-801.
Failure of the
SCU-801.
Failure of the
SCU-801.
Pump operation
Decelerate and stop.
Contact noise and vibration of the rotor are generated from the STP
pump.
Decelerate and stop.
Decelerate and stop.
Free run
.
*1
Decelerate and stop
.
Occurrence condition
Overheat inside the SCU-801.
Excessive imbalance.
Failure of serial communication.
Abnormal CPU operation
.
Abnormal driver operation
.
LCD Messages
CNT Overheat 1
Disturbance X_B Disturbance X_H Disturbance Y_B Disturbance Y_H Disturbance Z
Driver Com Failure
Driver CPU Error
Driver Failure