Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 123
8
MAINTENANCE
Referred
section
3.11
8.1.1 3.6.3 3.6.3 2.1
Table
38 - Error
messages after self test (continued)
Countermeasures
1. Connect the cable
correctly. If the cable is not locked, lock it securely.
2. Set "Leak Valve Option" to
"DISABLE".
1. Check the specifications of
the connected STP pump.
2. Contact Service office.
1. Contact Service office. 2. Contact Service office.
Change the AC input voltage 200V.
Contact Service office
.
1. Check whether or not a
power failure has
occurred.
2. Connect the power cable
correctly.
3. Replace the power cable. 4. Set the voltage to the rated
voltage
±10%.
Probable causes
1. Disconnection of the
emergency vent valve cable.
2. Incorrect setting of the
emergency vent valve.
1. STP pump is not
compatible with external TMS unit
2. Failure of external TMS
unit
1. Failure of the STP
pump.
2. Failure of the SCU
-801.
Incorrect connection of the input power supply
.
Failure of the STP
pump.
1. Power failure. 2. Incorrect connection of the
power cable.
3. Failure of
the power cable.
4. Insufficient power supply
voltage.
Pump operation
Decelerate and stop.
Decelerate and stop
.
Touch down. The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
Touch down. The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
Decelerate and stop.
Decelerate and stop.
Occurrence condition
Disconnection of the emergency valve cable.
External TMS Error
Excessive magnetic bearing electric current continues for 30 sec.
Connection of the STP pump not corresponding to the input power supply (100V).
Disconnection of the temperature sensor of the STP pump.
Insufficient power supply.
LCD Messages
E.valve disconnect
External TMS Fail
Inordinate Current
Insufficient Supply
M_Temp Sensor Lost
Mains Failure