Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 124
8
MAINTENANCE
Referred
section
Instruction manual
(B)
Instruction manual
(B)
4.1.1 4.1.2
3.6.1 3.9.1
3.6.1
Table
39 - Error
messages after self test (continued)
Countermeasures
1. Set the temperature of the
baking heater to 120 ºC (248 ºF) or less.
2. At the time of baking or gas
pumping, always cool the STP pump.
3. Check the piping system for
leakage.
4. Repetition
s start/stop
operations may cause the STP pump to overheat.
1. Turn OFF, and connect the
STP connection cable correctly.
2. Contact Service office 3. Perform tuning after power
ON operation.
4. When the error is displayed
after tuning, contact Service office.
5. .
Contact Service office.
1. Connect the cable
correctly. If the cable is not locked, lock it securely.
2. Contact Service office.
Contact Service
office.
Contact Service office.
Probable causes
1. Overheating during
baking.
2. Insufficient cooling. 3. Leakage of the vacuum
piping system.
4. Repetition start/stop
.
operations.
1. Incorrect connection of the
STP connection cable.
2. Failure of the STP
connection cable.
3. Failure of the STP pump.
4. Failure of the SCU
-801.
Failure of the SCU
-801.
1. Incorrect connection of the
STP connection cable.
2. Failure of the STP
connection cable.
Failure of the SCU
-801.
Failure of the SCU
-801.
Pump operation
Decelerate and stop.
Rotation is inoperative
.
Breaker OFF. Decelerate and stop.
Touch down. The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
Decelerate and stop
.
Decelerate and stop
.
Occurrence condition
Overheating
inside the
STP pump.
Motor resistance measurement
is
Insufficient
.
Rotational speed exceeds rated speed.
Disconnection of the STP connection cable
.
Failure of record in memory
.
Failure of serial communication.
LCD Messages
Motor Overheat
Motor
Resistor Lost
Overspeed 1 Overspeed 2 Overspeed 3
P.Cable Disconnected
PCB Record Failure
PCB->DSP Com Fail