Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 125
8
MAINTENANCE
Referred
section
8.3.3 3.12
*1 The driver output stops and the rotor continues rotating by inertia.
It may take several hou
rs to stop. To stop the STP pump quickly, close the vacuum valve at the outlet port flange
and introduce gas from the purge port into the STP pump.
Table
40 - Error
messages after sel
f test (continued)
Countermeasures
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Overhaul is needed. Contact Service office.
1. Contact Service office. 2. Contact Service office.
Overhaul is needed.
Contact
Service office. Set "Warning Damage Point" to "DISABLE" to release the error and continue operation temporary.
Probable causes
Failure of the SCU
-801.
Failure of the STP pump.
Failure of the SCU
-801.
Failure of the SCU
-801.
Failure of the
SCU-801.
Frequency of "Disturbance"
or
"Mains
Failure
" error.
1. STP pump failure. 2. Failure of the SCU
-801.
Frequency of "Disturbance"
or
"Mains
Failure
" error.
Pump operation
Decelerate and stop
.
Decelerate and stop
.
Decelerate and stop
.
Decelerate and stop
.
Decelerate and stop
.
Decelerate and stop
.
Free run
*1
Rotation is inoperative
.
Occurrence condition
Abnormal power circuit.
Failure of record in memory
.
Abnormal memory.
Failure of serial communication
.
Abnormal board connection
.
When the extent of the damage on the touch down bearing exceeds the second damage limit.
Abnormal rotational speed detection.
"Second Damage Limit" occurs.
LCD Messages
Power Supply Failure
Pump Record Failure
Ram Error
R-Unit Com
Failure
R-Unit Failure
Second Damage Limit
Speed Pulse Lost
START NOT ALLOWED