Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 126
8
MAINTENANCE
Referred
section
3.6.2
3.11.3
Table
41 - Error
messages after sel
f test (continued)
Countermeasures
1. Connect the cable
correctly. If the cable connector is not locked, lock it securely.
2. Connect the cable
correctly. If the cable is not locked, lock it securely.
3. Power ON the external
TMS unit and perform the reset operation.
4. Contact Service office.
5. When the TMS function is
not in use, set the TMS function to "DISABLE"
.
Probable
causes
1. Disconnection of the TMS
connection cable.
2. External TMS unit is not
connected
3. External TMS unit is not
powered ON
4. Failure of the TMS
connection cable.
5. Incorrect setting of the
TMS function.
Pump operation
Decelerate and stop.
Occurrence condition
TMS connection cable is not connected when the state "TMS Function" is set to "ENABLE"
, "External" or
"Advanced"
.
LCD Messages
T.Cable Disconnected