Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 127
8
MAINTENANCE
Referred
section
Instruction manual
(B)
Instruction manual
(B)
3.11.3 3.6.2
3.9.1
Table
42 - Error
messages after self test (continued)
Countermeasures
1. Connect the
electromagnetic cooling water valve correctly. Check the volume of water and water temperature.
2. Contact
Service office.
1. Connect the
electromagnetic cooling water valve correctly. Check the volume of water and water temperature.
2. Contact Service office.
1. Contact Service office. 2. When the TMS function is
not in use, set the TMS function to "DISABLE"
.
3. Connect the cable
correctly. If the cable connector is not locked, lock it securely.
4. Contact Service office.
1. Perform tuning after
power
ON/OFF
operation.
2. When the error is displayed
after tuning, contact Service office.
Probable causes
1. Cooling
failure of
TMS unit
.
2. Failure of
the TMS unit.
1. Cooling failure of TMS unit
.
2. Failure of the TMS unit.
1. Disconnection of the TMS
sensor.
2. Incorrect setting of the
TMS function.
3. Disconnection of the TMS
connection cable.
4. Failure of the TMS
connection cable.
1. Failure of the STP
pump.
2. Failure of the SCU
-801.
Pump operation
Decelerate and stop.
Decelerate and stop.
Decelerate and stop.
Touch down. The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
Occurrence condition
TMS temperature control error (when the TMS unit detection temperature becomes higher than the setting value by 10°C (18 ºF) or more.
TMS temperature control error (when the TMS unit detection temperature becomes lower than the setting value by 10°C
(18
ºF) or more.
Error is not
detected for a certain time after the STP pump starts.
TMS sensor is not connected when the state "TMS Functi
on" is
"ENABLE"
, "External" or
"Advanced".
Tuning failure.
LCD Messages
TMS Higher Temp
TMS Lower Temp
TMS Sensor Lost
Tuning Error 1
: :
Tuning Error
19