Contents
11
Maintaining the GC/MSD interface 172
To remove the GC/MSD interface heater and sensor, 173
To reinstall the GC/MSD interface heater and sensor, 175
Maintaining the electronics 177
To adjust the RF coils, 179
To replace the primary fuses, 181
Chapter 5 Vacuum System
Diffusion pump MSD vacuum system, 186
Turbo pump MSD vacuum system, 187
Diffusion pump vacuum manifold, 188
Turbo pump vacuum manifold, 189
Side plate, 190
Vacuum seals, 192
Face seals, 192
KF (NW) seals, 192
Compression seals, 192
High voltage feedthrough seal, 193
Foreline pump, 194
Foreline gauge, 196
Diffusion pump and fan, 198
Turbomolecular pump and fan, 202
Calibration valve and vent valve, 204
Calibration valve, 204
Vent valve, 204
Triode gauge tube, 206
Gauge controller, 208
Chapter 6 GC/MSD Interface
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