Inficon Transpector XPR 3+ User Manual

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Transpector XPR 3+ Operating Manual
Temperature error Transpector XPR 3+ internal
ambient temp >70°C
Verify unit is installed
properly, ambient temp
<50°C.
Verify that there are no heat
sources in local proximity.
Verify that internal fan is
running.
Electronics failure Return to INFICON for repair.
Overpressure Total pressure plate current
exceeded trip threshold
Reduce pressure.
Total pressure plate is
contaminated
Return to INFICON for repair.
Electrometer Error Excessive current (>2E-6
Amps)
Reduce pressure.
Reduce EM voltage.
Electronics failure Return to INFICON for repair.
Mass Filter Error Bad tune file Retune RGA.
Contaminated quadrupole Return to INFICON for repair.
Ion Source Error Incorrect Ion source settings Load original configuration
file.
Ion source contaminated Return to INFICON for repair.
Detector Error EM voltage set too high Reduce EM voltage.
Detector not working
correctly
Replace EM detector.
DSP
Communications
Error
Incorrect DSP response
detected
Reset electronics box.
Return electronics box to
INFICON for repair.
DEC
Communications
Error
Incorrect DEC response
detected
Reset electronics box.
Return electronics box to
INFICON for repair.
Table 8-1 Symptom—Cause—Remedy chart (continued)
SYMPTOM CAUSE REMEDY

Inficon Transpector XPR 3+ Specifications

General

Brand	Inficon
Model	Transpector XPR 3+
Category	Measuring Instruments
Language	English