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Inficon Transpector XPR 3+ User Manual

Inficon Transpector XPR 3+
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8 - 5
Transpector XPR 3+ Operating Manual
Poor
sensitivity
Sensor contaminated Degas sensor.
Bake-out sensor.
Service sensor.
System pressure too low Increase sample pressure, if
possible.
Mass calibration (resolution) Adjust Mass Calibration,
increase peak width.
Sensor operating
parameters set wrong
Check settings of: electron
energy, ion energy, focus
emission current.
Improper calibration Ensure that the total pressure
gauge used for sensitivity
calibration was properly
calibrated.
Electronics failure Return to INFICON for repair.
EM has low gain Bake-out sensor.
Replace sensor.
Poor peak shape Sensor contaminated Degas sensor.
Bake-out sensor.
Service sensor.
System pressure too high Verify pressure less than
2E-2 Torr for
Transpector XPR 3+.
Mass calibration required Perform mass calibration.
Electronics failure Return to INFICON for repair.
Table 8-1 Symptom—Cause—Remedy chart (continued)
SYMPTOM CAUSE REMEDY

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Inficon Transpector XPR 3+ Specifications

General IconGeneral
BrandInficon
ModelTranspector XPR 3+
CategoryMeasuring Instruments
LanguageEnglish

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