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Inficon Transpector XPR 3+ User Manual

Inficon Transpector XPR 3+
130 pages
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Transpector XPR 3+ Operating Manual
www.inficon.com reachus@inficon.com
Due to our continuing program of product improvements, specifications are subject to change without notice.
All trademarks are the property of their respective owners.
®
PN 074-687-P1A ©2017 INFICON
none 7-4
spinning rotor gauge 4-11
supply voltage 1-7
surface film 3-13
T
temperature
bakeout 11-3
coefficient 11-2
error 7-3
max operating 11-3
operating 11-3
operating range 1-8
total pressure 9-6
total pressure plate 9-7
transition flow 9-7
transmission factor 4-12, 4-13, 9-7
tuned 4-16
tungsten hexafluoride 3-13
U
ultrahigh vacuum 4-14
user configured switches 11-4
V
vacuum region 4-14
vacuum system 4-14
ventilation requirements 1-7
viscous flow 9-7
W
weight 1-6
Z
zero blast 9-7

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Inficon Transpector XPR 3+ Specifications

General IconGeneral
BrandInficon
ModelTranspector XPR 3+
CategoryMeasuring Instruments
LanguageEnglish

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