Inficon Transpector XPR 3+ - Page 52

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Transpector XPR 3+ Operating Manual
Figure 3-1 Transpector XPR 3+ sensor
Electrometer
-1275 V
-50 to -500 V
Micro-Channel
Plate
Ions
Collector
Plate
Electrons
Total Pressure
Ion Chamber
Partial Pressure
Ion Chamber
Dual Filament
Y
2
O
3
/ Ir
Hyperbolic
Quadrupole
18mm Long