Inficon XTC/3 User Manual

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XTC/3 Operating Manual
1 (0x01) * Current Rate (Float) Å/Sec -One second rolling average-
2 (0x02) Current Power (Float) %
3 (0x03) Current Thickness (Float) kÅ
4
(0x04)
Current State (Byte) - Decoded as follows: -
0 = Ready
1 = Crucible Switch
2 = Rise 1
3 = Soak 1
4 = Rise 2
5 = Soak 2
6 = Shutter Delay
7 = Deposit
8 = Rate Ramp
9 = Manual
10 = Time Power
11 = Idle Ramp
12 = Idle
5 (0x05) Current State Time (Int) - Number of seconds -
6 (0x06) Active Layer (Int)
7 (0x07) Active Film (Byte)
8 (0x08) Active Sensor (Byte) ( 1 or 2)
9 (0x09) Crystal Life (Byte)
10 (0x0a) Power Source (Byte) ( 1 or 2)
11
(0x0b)
Output Status Byte (4 Byte) - Each bit represents an output -
(0 = not set, 1 = set)
Output 1 = LSB, Output 20 = 20th bit
Table 5-4 Standard Status commands (continued)
S
(0x53)
Command ID
Description Response:
Description (Data Format) Units -Detail-

Inficon XTC/3 Specifications

General

Brand	Inficon
Model	XTC/3
Category	Controller
Language	English