Inficon XTC/3 User Manual

5 - 33
XTC/3 Operating Manual
33
(0x21)
Status Messages (4 bytes) Each bit indicates which status
message is displayed.
0x80000000 = Max Power
0x40000000 = Crystal Fail
0x20000000 = Crystal Switch Fail
0x10000000 = Crystal Switching
0x08000000 = Carousel Open
0x04000000 = Control Delay
0x02000000 = Transfer Delay
0x01000000 = Delay Failure
0x00800000 = End of Process
0x00400000 = RateWatcher Delay
0x00200000 = RateWatcher Hold
0x00100000 = RateWatcher Sample
0x00080000 = Crucible Switch Fail
0x00040000 = Soak Hold
0x00020000 = Non Deposit Hold
0x00010000 = Etch Mode
0x00008000 = Local Lock
0x00004000 = Remote Lock
0x00002000 = Test
0x00001000 = Delayed Start
0x00000800 = Testing XIU
0x00000400 = Layer Insert
0x00000200 - 0x00000001 not defined
34 (0x22) Raw Rate (Float) Rate Å/Sec
35
(0x23)
Ethernet
parameters
(8 bytes) First 4 bytes = IP address (xx.xx.xx.xx)
Second 4 bytes = Net Mask (xx.xx.xx.xx)
where the left most xx group is the MSB in both
Table 5-4 Standard Status commands (continued)
S
(0x53)
Command ID
Description Response:
Description (Data Format) Units -Detail-

Inficon XTC/3 Specifications

General

Brand	Inficon
Model	XTC/3
Category	Controller
Language	English