Inficon XTC/3 User Manual

5 - 32
XTC/3 Operating Manual
19
(0x13)
Data Log Returns data as follows
Layer # (Int)
Film # (Int)
Rate (Float) Å/Sec - One second average-
Thickness (Float) kÅ
Deposit time (Int) Seconds
Average power (Float) %
S Value (Int)
Q Value (Byte)
Begin Frequency (Float) HZ
End Frequency (Float) HZ
Crystal Life (Byte) %
Layer end type (Byte) -Normal end (0), Time
power end (1) or Stop (2) -
Cause of stop: (Byte)
0 = No stop
1 = Keyboard
5 = Crystal Fail
6 = Max Power
7 = Hand Controller
8 = Communications
9 = Digital Input
10 = Power Loss
11 = Rate Dev Error
12 = Crystal Switcher fail
20 (0x14) Active Process (Byte)
21 (0x15) Power up error flag (Byte) Bit is set indicating error as follows:
0 = Parameter loss on power cycle
1 = Process variables loss on power cycle
2 = Power down/up cycle
30
(0x1e)
Crystal Status (2 Bytes) Each bit indicates one crystal of a
multi-head sensor. 1 = Good Crystal, 0 = Failed
Crystal. LSB is Crystal 1. All bits > number of
crystals on sensor are 0.
31
(0x1f)
Rolling Average (Float) Å/Sec Returns a rolling 6.25-second
average of the measurement rate. Updated
every 0.25 seconds.
32 (0x20) Active Crystal (Byte) Crystal of the current sensor that is in use.
Table 5-4 Standard Status commands (continued)
S
(0x53)
Command ID
Description Response:
Description (Data Format) Units -Detail-

Inficon XTC/3 Specifications

General

Brand	Inficon
Model	XTC/3
Category	Controller
Language	English