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Model 6514 System Electrometer

Instruction Manual

©1998, Keithley Instruments, Inc.

All rights reserved.

Cleveland, Ohio, U.S.A.

Fourth Printing, May 2003

Document Number: 6514-901-01 Rev. D

Table of Contents

Default Chapter7
- Table of Contents7
Getting Started23
- General Information24
- System Electrometer Features26
- Front and Rear Panel Familiarization27
- Power-Up32
- Display34
  - Status and Error Messages34
- Default Settings34
- Table 1-2 Default Settings35
- SCPI Programming37
Measurement Concepts38
- Measurement Overview39
- Performance Considerations39
- Connection Fundamentals40
- Zero Check and Zero Correct50
- Input Bias Current and Offset Voltage Calibration54
- Measurement Considerations56
- Table 2-6 Summary of Measurement Considerations56
Volts and Ohms Measurements58
- Measurement Overview59
- Guarding59
- Volts and Ohms Measurement Procedure61
  - Figure 3-2 Connections for Unguarded Volts and Ohms62
  - V-Drop and I-Source for Ohms63
- SCPI Programming64
  - Table 3-1 SCPI Commands — Volts and Ohms Function64
  - Programming Example65
- Volts and Ohms Measurement Considerations66
- Application71
  - Capacitor Dielectric Absorption71
  - Figure 3-9 Measuring Dielectric Absorption72
Amps Measurements73
- Measurement Overview74
- Amps Measurement Procedure74
  - Damping76
  - Figure 4-1 Connections for Amps76
- High Impedance Measurement Techniques77
  - Figure 4-2 High Impedance Current Measurements77
  - Figure 4-3 Floating Current Measurements79
- SCPI Programming80
  - Table 4-1 SCPI Commands — Amps Function80
  - Programming Example81
- Amps Measurement Considerations81
- Applications85
Coulombs Measurements88
- Measurement Overview89
- Auto Discharge89
- Coulombs Measurement Procedure90
  - Figure 5-1 Typical Connections for Coulombs91
  - Table 5-1 SCPI Commands — Coulombs Function92
- SCPI Programming92
  - Programming Example93
- Coulombs Measurement Considerations93
5 Coulombs Measurements94
- Application94
  - Capacitance Measurements94
  - Figure 5-2 Measuring Capacitors94
Range, Units, Digits, Rate, and Filters95
6 Range, Units, Digits, Rate, and Filters96
- Range, Units, and Digits96
- Rate100
- Filters102
Relative, MX+B and Percent (%)106
- Relative107
7 Relative, MX+B and Percent (%)108
- MX+B and Percent (%)109
Buffer112
- Store112
- Recall112
  - Buffer Operations113
8 Buffer114
- SCPI Programming115
  - Programming Example117
Triggering118
- Trigger Models119
- SCPI Programming126
  - Table 9-2 SCPI Commands — Triggering126
  - Programming Example127
- External Triggering128
Limit Tests132
10 Limit Tests133
- Limit Testing133
- Figure 10-1 Limit Tests133
- Figure 10-2 Limit Tests Example133
- Figure 10-3 Operation Model for Limit Test134
- Table 10-1 Test Limit Display Messages134
- Binning135
- Front Panel Operation141
  - Limit Test Conﬁguration141
  - Perform Limit Tests142
- SCPI Programming143
  - Table 10-2 SCPI Commands — Limit Tests143
  - Programming Example146
Digital I/O, Analog Outputs, and External Feedback147
- Analog Outputs147
11 Digital I/O, Analog Outputs, and External Feedback148
- Digital I/O Port148
- Analog Outputs153
- External Feedback157
Remote Operation164
- Selecting and Conﬁguring an Interface165
12 Remote Operation168
- GPIB Operation and Reference168
- RS-232 Interface Reference180
Status Structure183
- Overview184
13 Status Structure185
- Figure 13-1 6514 Status Mode Structure185
- Clearing Registers and Queues186
- Table 13-1 Common and SCPI Commands — Reset Registers and Clear Queues186
- Programming and Reading Registers187
- Status Byte and Service Request (SRQ)189
- Status Register Sets193
- Queues200
Common Commands203
- Table 14-1 IEEE-488.2 Common Commands and Queries204
SCPI Signal Oriented Measurement Commands207
- Table 15-1 Signal Oriented Measurement Command Summary208
Display, Format, and System211
- Display Subsystem212
- Table 16-1 SCPI Commands — Display212
- Format Subsystem214
- Table 16-2 SCPI Commands — Data Format214
16 Display, Format, and System215
- Figure 16-1 ASCII Data Format215
- System Subsystem218
- Table 16-3 SCPI Commands — System218
- Figure 16-3 Key-Press Codes220
17 SCPI Reference Tables221
SCPI Reference Tables221
- Table 17-1 Calculate Command Summary221
- Table 17-4 Sense Command Summary221
- Table 17-7 System Command Summary221
- Table 17-8 Trace Command Summary221
- Table 17-9 Trigger Command Summary221
- General Notes222
- Table 17-2 Format Command Summary225
- Table 17-3 Display Command Summary225
Performance Veriﬁcation235
- Introduction236
- Veriﬁcation Test Requirements237
- Recommended Test Equipment238
18 Performance Verification239
- Table 18-1 Recommended Veriﬁcation Equipment239
- Veriﬁcation Limits240
  - Example Reading Limits Calculation240
  - Recalculating Resistance Reading Limits240
- Calibrator Voltage Calculations241
  - Current Calculations241
  - Charge Calculations241
- Performing the Veriﬁcation Test Procedures242
  - Test Summary242
  - Test Considerations242
- Restoring Factory Defaults243
- Input Bias Current and Offset Voltage Calibration243
  - Offset Voltage Calibration243
  - Input Bias Current Calibration243
- Volts Measurement Accuracy244
- Table 18-2 Voltage Measurement Accuracy Reading Limits245
- Amps Measurement Accuracy246
- Ohms Measurement Accuracy249
- Coulombs Measurement Accuracy252
- Table 18-7 Coulombs Measurement Accuracy Reading Limits253
Calibration254
- Introduction255
- Environmental Conditions255
- Calibration Considerations256
  - Calibration Cycle256
- Recommended Calibration Equipment256
19 Calibration257
- Table 19-1 Recommended Calibration Equipment257
- Calibration Errors258
- Calibration Menu258
- Aborting Calibration258
- Table 19-2 Calibration Menu258
- Current and Charge Calculations259
  - Manual Calculations259
  - Automatic Calculations259
- Calibration Procedure260
- Changing the Calibration Code271
- Resetting the Calibration Code272
- Displaying Calibration Dates272
- Displaying the Calibration Count273
Routine Maintenance274
- Introduction275
- Setting Line Voltage and Replacing Line Fuse275
20 Routine Maintenance276
20 Routine Maintenance276
- Figure 20-1 Power Module276
- Table 20-1 Power Line Fuse276
- DISP Test277
- Front Panel Tests277
- KEY Test277
- Table 20-2 Front Panel Tests277
- Status and Error Messages282
B Status and Error Messages283
- Table B-1 Status and Error Messages283
- General Measurement Considerations288
100 C General Measurement Considerations289
- Measurement Considerations289
- DDC Emulation Commands294
500 D DDC Emulation Commands295
- DDC Language295
- Table D-1 Device Dependent Command Summary295
- Example Programs299
  - Programming Examples300
IEEE-488 Bus Overview306
- Introduction307
- Figure F308
- Bus Description308
- Figure F309
- Bus Lines310
F IEEE-488 Bus Overview311
F IEEE-488 Bus Overview312
- Bus Commands312
- Interface Function Codes318
IEEE-488 and SCPI Conformance Information320
- Table G-1 IEEE-488 Documentation Requirements321
- Introduction321
G IEEE-488 and SCPI Conformance Information323
- Table G-2 Coupled Commands323
Calibration Options324
H Calibration Options325
- Figure H325
- Introduction325
- Reading Calibration Standard Values325
H Calibration Options327
- Remote Calibration327

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