1. Overview
No. 99MBA091A
1-5
1.2.2 Cross-travel stage unit
IMPORTANT
The stage glass is made of glass to transmit the transmitted illumination light.
Do not bump the stage glass when installing a workpiece on it. If placing a heavy
workpiece with protrusions on the stage glass, exercise attention so as not to
scratch the glass.
9） Cross-travel stage ： Mounts a workpiece on the XY stage; its stroke varies
depending on the MF model.
・MF-＊505C 50mmX 50mm
・MF-＊1010C 100mmX100mm
・MF-＊2010C 200mmX100mm
・MF-＊2017C 200mmX170mm（with swivel table）
・MF-＊3017C 300mmX170mm（with swivel table）
・MF-＊4020C 400mmX170mm（with swivel table）
TIP
The MF-＊505C，MF-＊1010C，and MF-＊2010C models have no table rotating
mechanism on the cross-travel stage. If necessary, use the fine-feed rotary table
(A) (No.176-305) from the optional accessories. The fine-feed rotary table (B)
(No.176-306) is also available as an option accessory for the MF-＊2017C，MF-＊
3017C，and MF-＊4020C models.
10） Linear scale：Three pieces of Linear scale are mounted on each of the X- and
Y-axes of the XY stage and the Z-axis column.（The Linear scale may not be
mounted on the Z axis of some models.） The displacement of the stage and optical
tube unit is displayed on the DRO counter.
11） X-axis fine feed wheel：Used to finely move the cross-travel stage along the X-axis
direction.
12） X-axis coarse-feed wheel：Used to quickly move the cross-travel stage along the
X-axis direction.
13） X-axis zero-set switch：A switch for zero-setting a X-axis display value on the
counter.
14） Y-axis fine feed wheel：Used to finely move the cross-travel stage along the Y-axis
direction.
15） Y-axis coarse-feed wheel：Used to quickly move the cross-travel stage along the
Y-axis direction.
16） Y-axis zero-set switch
：A switch for zero-setting a Y-axis display value on the
counter.
17） Swivel knob（for MF-＊2017C，MF-＊3017C and MF-＊4020C）：Used to swivel the
XY stage up to ±5° or ±3° .（This knob is not provided for the MF-＊505C，MF-
＊1010C and MF-＊2010C models.）
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