No. 99MBA091A
6-1
6 Specifications
This chapter describes the specifications, standard accessories, and
optional accessories of the Measuring Microscope.
6.1 Common Specifications
2 Axes type MF-A505C MF-A1010C MF-A2010C MF-A2017C MF-A3017C MF-A4020C Model
No.
3 Axes type MF-B505C MF-B1010C MF-B2010C MF-B2017C MF-B3017C MF-B4020C
Optical tube
・Reticle projection type ・Erect image ・with TV port
・Optical path fixed type: Observation/TV=50/50
・Vertical tilt angle: 25 degrees ・Reticle: 90° broken-cross line (line width 5µm)
Eyepiece unit (option)
・Monocular unit (with a 10X eyepiece) ・Binocular unit (with two 10X eyepieces)
Objective (standard)
・3X (standard accessory)
Objective (option)
・1X,5X,10X,20X,50X,100X
LED
illuminator
Transmission:・Telecentric system ・Built-in aperture diaphragm ・White LED light source
・Non-step light intensity control ・with Air-cooling fan
Reflection: ・Koehler illumination ・with Adjustable aperture diaphragm ・White LED light source
・Non-step light intensity control
・Control unit: Main power ON/OFF switch (main switch) ・AC power inlet connector 100-240V
Illuminator
unit
(Option:
requisite
selection)
Halogen
Transmission:・Telecentric system ・Built-in aperture diaphragm ・Halogen bulb 12V, 50W
・Non-step light intensity control ・with Air-cooling fan
Reflection:・Koehler illumination ・with Adjustable aperture diaphragm ・Halogen bulb 12V, 50W
・Non-step light intensity control ・with Air-cooling fan
・Control unit: Main power ON/OFF switch (main switch) ・AC power inlet connector 100-240V
Illumination filter
・Detachable/attachable green filter : 1 piece supplied
(detachable/attachable for both reflected and transmitted illuminators)
Control panel
・Power switch (accessible sub switch for operation)
・Adjustable aperture diaphragm (Transmitted)
・Transmitted illuminator: OFF~Non-step
・Reflected illuminator: OFF~Non-step
Traverse range
150 mm(5.9”) 220 mm(8.7”)
Z-axis
Feeding
mechanism
・1-axis coarse / fine feed
・Both left / right wheel (coarse: 30 mm(1.18”) / full-turn, fine: 0.2 mm(0.008”) / full-turn)
Traverse range
50×50mm
(2.0” X 2.0”)
100×100mm
(3.9” X 3.9”)
200×100mm
(7.9” X 3.9”)
200×170mm
(7.9” X 6.7”)
300×170mm
(11.8” X 6.7”)
400×200mm
(15.7” X 7.9”)
Stage surface
dimensions
280×280mm
(11.0” X 11.0”)
280×280mm
(11.0” X 11.0”)
350×280mm
(13.8” X11.0”)
410×342mm
(16.1” X 13.5”)
510×342mm
(20.1” X 13.5”)
610×342mm
(24.0” X 13.5”)
Stage glass
dimensions
180×180mm
(7.1” X 7.1”)
180×180mm
(7.1” X 7.1”)
250×150mm
(9.8” X 5.9”)
270×240mm
(10.6” X 9.4”)
370×240mm
(14.6” X 9.4”)
440×240mm
(17.3” X 9.4”)
Quick release
mechanism
Built-in at both X-axis and Y-axis
Indication
Accuracy
(2.2+0.02L) µm L: Measuring length (mm): Compliant with the measuring method of JIS B 7153
Table rotating
function
None with Swivel mechanism ±5° ±3°
Cross
-travel
stage
Maximum load 10kg (22.1 lb) 10kg (22.1 lb) 10kg (22.1 lb) 20kg (44.1 lb) 20kg (44.1 lb) 15kg (33.1 lb)
Number of axes 3 axes or 2 axes
Resolution 0.001 / 0.0005 / 0.0001mm (0.0001 / 0.00005 / 0.00001”) switchable
Counter
Function Zero setting / Direction mode selection / RS-232C output
Dimensions 562x730x667
22.1”x 28.7”x 26.2”
562x730x667
22.1”x28.7”x26.2”
624x745x667
24.6”x29.3”x26.2”
632x892x782
24.8”x35.1”x30.8”
682x892x782
26.9”x35.1”x30.8”
757x907x782
29.8”x35.7”x30.8”
6