No. 99MBA091A
2-2
2.2 Remove the Fixing Plate
Remove the fixing plates for cross-travel stage and optical tube unit after installing the
main unit.
2.2.1 Removing the fixing plate for cross-travel stage
Remove eight pieces of fixing plate (one piece for MF-＊505C, MF-＊1010C, and MF-＊
2010C) from the XY stage.(Use a 3mm Allen wrench.)
① For MF-＊2017C, MF-＊3017C, and MF-＊4020C
② For MF-＊505C, MF-＊1010C, and MF-＊2010C
Fixing plate
Fixing plate
(same numbers in the opposite side)
Fixing plate
(same numbers in the opposite side)
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