No. 99MBA091A
3-6
3.6 Setting Up a Workpiece
Place a workpiece as its surface to be measured (on the objective side) become at right
angles to the optical axis of objective. The stage glass surface is at right angles to the
optical axis of objective. If the workpiece surfaces are parallel, place the workpiece directly
on the stage glass. If the surfaces are not parallel, adjust the measured surface to become
at right angles to the optical axis with an appropriate fixture. Unless the measured surface
is at right angles to the optical axis, it is impossible to focus the objective on the surface
over the entire field of view.
Workpiece
Stage glass
Objective
Optical axis
Square
NOTE
1. A shock while setting up a workpiece may break the stage glass, resulting in
damage and personal injury. Exercise care so as not to bump the measuring
unit during setup.
2. A workpiece that extends over the end of the XY stage can interfere with the
main unit when the stage moves. Carefully mount the fixture on the stage.
3. If a large size of cross-travel stage such as MF-＊2017C, MF-＊3017C, and MF-
＊4020C is moved particularly rearward on the Y axis (toward the column),
exercise care so that a workpiece or a fixture will not interfere with the main
unit.
IMPORTANT
Since the clamp is used only to prevent the workpiece from moving during
measurement, there is no need for extensive joint strength. An excessive
clamping force will deform a workpiece if it is made of thin or soft material, and a
correct measurement result may not be obtained. Use a clamping method that will
not deform the workpiece.
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