6 SPECIFICATIONS
This chapter describes the specifications of the measuring main unit
and accessories.
6
6.1 Specifications
Model No SV-3100S4 SV-3100H4 SV-3100W4 SV-3100S8 SV-3100H8 SV-3100W8
X-axis 100mm 200mm Measuring
range
Z1-axis 800µm / 80µm / 8µm
Z2-axis Column Unit
travel range
300mm 500mm 300mm 500mm
X-axis Tilting angle ±45°
X-axis STVC-10Z
Scale unit
Z2-axis Column
Unit
ABS Scale
Detecting
method
Z1-axis Differential inductance
X-axis 0.05µm
Z1-axis 0.01µm ( 800µm ), 0.001µm ( 80µm ), 0.0001µm ( 8µm )
Resolution
Z2-axis Column
Unit
1µm
X-axis 0 to 80 mm/s and manual
Drive speed
Z2-axis
Column Unit
0 to 20mm/s and manual
Measuring speed 0.02〜5mm/s
Drive unit straightness
(In the horizontal)
(0.5+0.001L)µm 0.5µm/200mm
Stylus vertical motion Circular motion
Measuring direction Pulling directions
Measuring face direction
Downward
Measuring force
Depends on code No. ( -1: 0.75mN、 -2: 4mN )
Stylus tip
Depends on code No. ( -1: 60゜,R2µm、 -2: 90゜,R5µm )
Base size (W x D) 600×450mm 1000× 450mm 600×450mm 1000×450mm
Base material Gabbro
Measuring
Unit
140Kg 150 Kg 220 Kg 140Kg 150 Kg 220 Kg
Controller
14 Kg
Mass
Remote box
0.9 Kg
No. 99MBB187A
6-1
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