2 INSTALLATION
This chapter describes the system installation environment and
system component connection.
2
2.1 Installation Environment
1. Temperature
This system has been assembled and adjusted in a 20°C temperature-controlled room. In
order to use this system at the accuracy given in the specifications it is necessary to install
this system in a place where the ambient temperature is close to 20°C and the
temperature variation is as small as possible.（An ideal installation environment is
Standard Temperature State Class 1, i.e. 20°C±1°C with a temperature gradient
maintained at 2°C per eight hours, as specified by the “Standard Precision Measurement
Environment” in the Japan Precision Measuring Machine Engineering Association
Standard, JMAS5001.）When the temperature environment is below this level, it may not
be possible to attain the expected accuracy as given in the specifications. In this condition,
if accuracy adjustment is attempted, normal adjustment is not guaranteed, and at 20°C
inaccurate measurements may result.
2. Humidity
Humidity will not directly affect the accuracy of the measuring machine, however, high
relative humidity may easily oxidize critical parts of the machine. Electronic parts may also
be adversely affected. To avoid these problems maintain the ambient humidity between 55
and 65% as much as possible.
3. Vibration
When this system is operated in an environment with significant vibrations, measurements
will not be stable, and will be dispersed.
The vibration limit is:
For frequencies less than 10 Hz: Less than amplitude of 2 µm, P-P
For frequencies between 10 Hz and 20 Hz: Less than an acceleration of 0.004 m/s (0.4
Gal)
If the environment vibration exceeds this limit, it is recommended to perform foundation
work or use the optional dedicated vibration isolating stand.
No. 99MBB187A
2-1
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