6. SPECIFICATIONS
178-087 2D-ALT
12AAD975
*1
Θ1-axis table
12AAE286 Θ1-axis worktable(200×200mm) Square table mounted on the Θ1-axis table
12AAE630 Θ1-axis installation plate
An installation plate for installing the Θ1-axis table
directly on the base
211-032 Centering chuck
211-031 Micro chuck
178-078
*1
Θ2-axis unit
12AAE705 Θ2-axis attachment plate (for Θ1-axis)
12AAE718 Θ2-axis installation plate
An installation plate for installing the Θ2-axis table
directly on the base
*: Optional accessories used along with cross-travel tables (218-001/011, 218-041/051) or rugged table (218-002).
*1: When the θ1 axis table and the θ2 axis unit are connected, “FORMTRACEPAK” is necessary.
No. 99MBB187A
6-9
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