MKS 937B Series User Manual

MKS 937B Operation Manual
4
10.6 User calibration commands ........................................................................................... 93
10.7 System commands ........................................................................................................ 93
10.8 ASCII character table .................................................................................................... 94
11 Maintenance of Series 937B Controller modules ................................................................... 95
11.1 Removing and Installing a Sensor Module .................................................................... 95
11.2 Removing and Installing AIO Module ............................................................................ 96
11.3 Communication Module ................................................................................................. 97
11.4 Power Supply ................................................................................................................ 97
11.5 Mounting the 937B controller ........................................................................................ 98
11.6 AC Power Cord ............................................................................................................. 99
12 Maintenance and Service of HPS

Vacuum Sensors ........................................................... 100
12.1 421 Cold cathode sensor ............................................................................................ 100
12.1.1 Cold cathode theory ................................................................................................. 100
12.1.2 Maintenance of Series 421/422 Cold Cathode Sensor ............................................ 101
12.2 Maintenance of Series 423 I-MAG
®
Cold Cathode Sensor ........................................ 104
12.2.1 Connecting the I-MAG Sensor ................................................................................. 104
12.2.2 Disassembling the I-MAG Sensor ............................................................................ 104
12.2.3 Cleaning the I-MAG Sensor ..................................................................................... 106
12.2.4 Assembling the I-MAG Sensor ................................................................................. 106
12.2.5 Preparing the Sensor for Bakeout ............................................................................ 107
12.3 Maintenance of Low Power Nude and Mini BA hot cathode sensors ......................... 107
12.3.1 Hot cathode theory ................................................................................................... 107
12.3.2 Cleaning the Hot Cathode Sensor ........................................................................... 108
12.3.3 Testing the hot cathode sensor ................................................................................ 109
12.4 Maintenance of Pirani Sensors ................................................................................... 109
12.4.1 Theory of a Pirani pressure sensor .......................................................................... 109
12.4.2 Cleaning the Series 345 Sensor .............................................................................. 110
12.4.3 Cleaning the Series 317 Sensor .............................................................................. 111
12.5 Maintenance of Capacitance Manometer ................................................................... 112
12.5.1 Theory of a capacitance manometer ....................................................................... 112
12.5.2 Repairing the Baratron™ Capacitance Manometer ................................................. 113
13 Spare Parts and Accessories ................................................................................................ 114
14 APPENDIX ............................................................................................................................ 117
14.1 Hot cathode gauge gas correction factors .................................................................. 117
15 Product Warranty .................................................................................................................. 120

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English