Main SP Tables-3
D146/D147/D148/D149/D150 2-384 System Maintenance Section
101
M/A Thresh_Low:K *ENG
[0.000 to 1.000 / 0.050 /
0.001mg/cm2/step]
Sets lower limit threshold of RTP pattern deposit amount target value (K).
102
M/A Thresh_Low:C *ENG
[0.000 to 1.000 / 0.100 /
0.001mg/cm2/step]
Sets lower limit threshold of RTP pattern deposit amount target value (C).
103
M/A Thresh_Low:M *ENG
[0.000 to 1.000 / 0.100 /
0.001mg/cm2/step]
Sets lower limit threshold of RTP pattern deposit amount target value (M).
104
M/A Thresh_Low:Y *ENG
[0.000 to 1.000 / 0.100 /
0.001mg/cm2/step]
Sets lower limit threshold of RTP pattern deposit amount target value (Y).
111
Weight Coeff:K *ENG [1 to 10 / 1 / 1/step]
Adds weight to leveling process of RTP pattern deposit amount target value (K).
112
Weight Coeff:Col *ENG [1 to 10 / 1 / 1/step]
Adds weight to leveling process of RTP pattern deposit amount target value
(Col).
3310
[ID.Sens :Voffset]
Displays specular reflection light output voltage of ID sensor's LED OFF time.
001 Voffset reg (Front) *ENG
[0.00 to 5.50 / 0.00 / 0.01V/step]
002 Voffset reg (Center) *ENG
003 Voffset reg (Rear) *ENG
3310
[ID.Sens :Voffset]
Displays diffuse reflection light output voltage of ID sensor's LED OFF time.
011 Voffset dif (Front) *ENG
[0.00 to 5.50 / 0.00 / 0.01V/step]
012 Voffset dif (Center) *ENG
013 Voffset dif (Rear) *ENG