Internal Calibrations Page 8-
[14] Press the ESC key. A dialog box will appear, asking if you
want to calculate the coefficients. Answering "yes" will
cause the calibration coefficients to be calculated. If the
spline linearization method is used, no coefficients will be
displayed, but the linear correlation coefficient will be
calculated. Since an uncalibrated ozone generator is more
non-linear than a mass flow controller, the correlation will
deviate from 1.0000 more than an MFC (e.g. 0.999XXX).
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