Operation Page 5-
[1] Calculate the source and diluent flow rates as follows:
If:
Desired Concentration = 500 PPB
Source Concentration = 50,000 PPB
Total Flow = 5.000 SLPM (5000 SCCM)
Ozone Flow = 100 SCCM
Then:
Desired Concentration X Total Flow
Source Flow = ----------------------------------
Source Concentration
500 X 5000
= ---------- = 50 SCCM
50,000
Diluent Flow = Total Flow - Ozone Flow - Source Flow
= 5000 - 100 - 50 = 4850 SCCM = 4.850 SLPM
[2] From the Main Menu screen, select Status and press the
Enter button then select Current Status and press enter.
Assuming no calibrations are active, the Idle Sequence
Status screen will appear as shown in Figure 5-4.
[3] Press the "Diag." button (or F11 on an external keyboard)
until the message "Debug Mode" is presented on the status
line near the bottom of the screen.
[4] Press the F3 (Tab) key until the Diluent MFC Control value
is highlighted. Enter the calculated diluent flow rate
(e.g. 4.850 SLPM) and press Enter or F3. Notice that an
"X" appears in the box associated with the Diluent 1
solenoid valve indicating that it has been automatically
activated. Also note that, assuming a pressurized diluent
source is attached, the monitor value will increase until
it approximately matches the control value.
[5] The Ozone MFC Control field should now be highlighted.
Enter 100 SCCM and press Enter or F3. The Ozone MFC
Monitor value should increase until it approximately
matches the control value.
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