109
Change from EI model
Interface
The interface for CI/NCI is different from that for EI, because reagent gas is introduced
through interface in QP2010.
Reagent gas controller
CI ion source / NCI ion source
REPELLER2 is include REPELLER assy in front of ion sorce.
REPELLER2 is different from EI and PCI and NCI(SEI,SCI) and DI.
REPELLER2 EI REPELLER2 CI, NCIREPELLER2 CI ,NCI(DI)
A2
A1
B
Evacuation line
PG
IG
For EI For CI For NCI
This part of the NCI ion
source is tapered
Φ4mm Φ1.2mm Φ0.8mm
TW300 TW70
E2M1.5 RP
Resistance tube
Reagent gas
Reagent gas
CI controller
Include CI
accesory
Small hole