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SPECS HSA3500 User Manual
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All rights reserved. No part of this manual may be reproduced
without the prior permission of SPECS GmbH.
User manual for the HSA3500 / HSA3500 plus Power Supply.
Version
1.9
printed
23 August 2010
.
SPECS order number for this manual:
78 000 186
HSA3500 / HS
A3500 plus Power Su
pply
SPECS GmbH - Surface Analysis
and Computer Technology
Voltastrasse 5
13355 Berlin
GERMANY
PHONE:+49 (0)30 46 78 24 -0
FAX: +49(0)30 4 64 20 83
http://www.specs.de
1
3
Table of Contents
Section 1
3
Default Chapter
3
Table of Contents
3
1 Introduction
7
Preface
7
General Information
7
Physical Specifications
8
Safety Instructions
9
Initial Inspection and Packaging List
9
EC10 Can-Ethernet-Adapter
10
Introduction
10
Figure 1: Rear Side of the EC10
10
Figure 2: Front Side of the EC10
10
Table 1: Packaging List of the HSA
10
Connectors, Diagnostic Leds and Switches
11
Table 2: Leds and Connectors of the EC10
11
Power Requirements
12
Pin Setting of the CAN Bus Connector
12
Table 3: Pin Setting of the CAN Bus Connector
12
Galvanic Decoupling
13
Propagation Delay
13
Figure 3: CAN Bus Connector (a Common DBUS-9)
13
Front / Back Panel Description
14
Figure 4: HSA3500 Plus Front Panel
14
Table 4: HSA3500 Plus Front Panel Description
14
Figure 5: HSA3500 Plus Back Panel
15
General Internal Layout
16
Figure 6: HSA General Internal Layout
16
Table 5: HSA3500 Plus Back Panel Description
16
Modules
17
Table 6: HSA3500 Modules
17
Table 7: HSA3500 Plus Modules
17
HSA Ranges
18
Table 8: HSA3500 Ranges
18
Table 9: HSA3500 Plus Ranges
18
2 Using the HSA
19
Installation
19
Vacuum Interlock
19
Figure 7: Vacuum Interlock Connector
19
Software for Interfacing with the HSA
20
Troubleshooting
20
Diag-Tool
21
Figure 8: Windows Registry Editor
22
Figure 9: Start Diag-*.Bat
23
Figure 10: Diagtool Command Box
23
Connection Check for the Analyzer Electrodes
24
Check All Analyzer (HSA) Voltages
24
Figure 11: Diag Log File
24
Fast Check of Voltage Ranges (Energy Scale)
25
Table 10: Voltage (Energy Scale) Check for 40V and 400V Range
25
Table 11: Voltage (Energy Scale) Check for 1500V and 3500V Range (with High Voltage Probe 1000:1)
25
Check/Set Offset and Gain with Voltmeter
26
Fast Check of All Applied Voltages
27
Figure 12: HSA3500 Plus with Opened Backplane, the Pin Numbers Are Indicated in the Zoomed Fig
29
Table 12: Voltages to Ground (Ekin = 800Ev, Ep = 20 Ev, WF=0), PHOIBOS 100/150 R6 or Higher, for
30
Table 13: Voltages to Ground (Ekin = 20Ev, Ep= 10 Ev, WF=0), PHOIBOS 100/150 R6 or Higher, for
31
Checking the Analyzer Voltages with Custom Setttings
32
Table 14: Abbreviations / Terminology
32
3 HSA Config Files (*.Hsa)
33
What Are HSA3500 Configuration Files
33
Nomenclature
34
Mode
34
Dacvoltage
34
Natural Cubic Spline
34
Syntax and Encoding
34
Comments
35
Header
35
Sections
35
Entries
36
Table 15: Supported Types
36
Inheritance
37
Sections and Layout
37
Info Section
37
Splinelist Section
38
Table 16: Info Section Description
38
Table 17: Splinelist Section Description
38
Logicalvoltagelist Section
39
Modelist Section
39
Table 18: Logicalvoltagelist Section Description
39
Splinedef Section
40
Table 19: Modelist Section Description
40
Table 20: Splinedef Section Description
40
Logicalvoltagedef Sections
41
Macro Sections
42
Table 21: Logicalvoltagedef Section Description
42
Modedef Sections
43
Table 22: Modedef Section Context
44
Table 23: Logicalvoltage Subsection in a Modedef Section
45
Table 24: Slothvoff Subsection in a Modedef Section
45
Table 25: Modedef Section Description
47
Adding Custom Voltages
50
Configcheck
51
Figure 13: Configcheck Startup Screen
52
4 Appendix
53
Working Ranges
53
Figure 14: Working Range for LM Mode up to 660Ev Pass Energy
53
Figure 15: Working Range for MM Mode up to 660Ev Pass Energy
54
Figure 16: Working Range for HM Mode up to 660Ev Pass Energy
54
Figure 17: Working Range for la Mode up to 660Ev Pass Energy
55
Figure 18: Working Range for MA Mode up to 660Ev Pass Energy
55
Figure 19: Working Range for SA Mode up to 660Ev Pass Energy
56
Figure 20: Working Range for HAD Mode up to 660Ev Pass Energy
56
Figure 21: Working Range for MAD Mode up to 660Ev Pass Energy
57
Figure 22: Working Range for LAD Mode up to 660Ev Pass Energy
57
Figure 23: Working Range for WAM Mode up to 660Ev Pass Energy
58
Figure 24: Working Range for SA2 Mode up to 660Ev Pass Energy
58
HSA Modules
59
Figure 25: Working Range for HM2 Mode up to 660Ev Pass Energy
59
0Xf1 - 3.5Kv Bipolar (HSA3500 Module)
60
Table 26: HSA3500 0Xf1 ADC Mapping
60
Table 27: HSA3500 0Xf1 Operation Modes
60
0Xe1 - 400V Bipolar (HSA3500 Module)
61
Table 28: HSA3500 0Xe1 ADC Mapping
61
Table 29: HSA3500 0Xe1 Operation Modes
61
0Xd1 - 3.5Kv Unipolar (HSA3500 Module)
62
Table 30: HSA3500 0Xd1 ADC Mapping
62
Table 31: HSA3500 0Xd1 Operation Modes
62
0Xb1 - 150Ma Bipolar (HSA3500 Module)
63
Table 32: HSA3500 0Xb1 ADC Mapping
63
0X04 - 3.5Kv Lens Bipolar (HSA3500 Plus Module)
64
Table 33: HSA3500 Plus 0X04 ADC Mapping
64
Table 34: HSA3500 Plus 0X04 Operation Modes
64
0X14 - 3.5Kv Analyzer Bipolar (HSA3500 Plus Module)
65
Table 35: HSA3500 Plus 0X14 ADC Mapping
65
Table 36: HSA3500 Plus 0X14 Operation Modes
65
0X24 - 400V Bipolar (HSA3500 Plus Module)
66
Table 37: HSA3500 Plus 0X24 ADC Mapping
66
Table 38: HSA3500 Plus 0X24 Operation Modes
66
0X34 - 3.5Kv Unipolar (HSA3500 Plus Module)
67
Table 39: HSA3500 Plus 0X34 ADC Mapping
67
Table 40: HSA3500 Plus 0X34 Operation Modes
67
0X44 - 150Ma Bipolar (Hsa3500Plus Module)
68
Table 41: Hsa3500Plus 0X44 ADC Mapping
68
Hardware Type and Backplane Wiring
69
Table 42: Hardware and Wiring Types
70
Wiring I
71
Figure 26: HSA3500 Wiring I
71
Figure 27: HSA3500 Wiring Backplane I
71
Wiring H
72
Figure 28: HSA3500 Wiring H
72
Figure 29: HSA3500 Wiring Backplane H
72
Wiring Q
73
Figure 30: HSA3500 Plus Wiring Q
73
Figure 31:HSA3500 Plus Wiring Backplane Q1
73
Wiring X1
74
Figure 32: HSA3500 Plus Wiring X1
74
Figure 33: HSA3500 Plus Wiring Backplane X1
74
Wiring X4
75
Figure 34: HSA3500 Plus Wiring X4
75
Figure 35: HSA3500 Plus Wiring Backplane X4
75
The Filterbox Cable
76
Interlock Connections
76
Pin Assignment
76
Table 43: Lens Connector
76
HSA3500 Tool
77
Figure 36: Schematics of the 12-Pin Analyzer Feedthrough
77
Table 44: Analyzer Connector
77
Commands Explained
81
Error Messages of the Diagnostic and Programming
84
Figure 37: HSA 3500 CE Conformity Declaration
87
Figure 38: HSA 3500 Plus CE Conformity Declaration
88
Section 2
89
4
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SPECS HSA3500 Specifications
General
Brand
SPECS
Model
HSA3500
Category
Power Supply
Language
English
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