Vacuum System 6
5977B Series MSD Troubleshooting and Maintenance Manual 155
Vacuum System Components
The parts of the vacuum system are identified in Figure 25.
• Foreline (rough) pump
• High vacuum pump (diffusion or turbo pump)
• Analyzer chamber
• Side plate (analyzer door), and front and rear end plates
• Vacuum seals
• Calibration valve(s) and vent valve
• Vacuum control electronics
• Vacuum gauges and gauge control electronics
Each of these is discussed in more detail in this chapter.
Figure 25 Example vacuum system components (MSD with turbo pump shown)
High vacuum
High vacuum
Analyzer
GC/MSD
Ion vacuum gauge (if present)
CI flow control
Vent valve
cooling fan
pump
pump
interface
chamber
(not shown)
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