Vacuum System 6
5977B Series MSD Troubleshooting and Maintenance Manual 157
Foreline Pump
The foreline pump reduces the pressure in the analyzer chamber so the high
vacuum pump can operate. It also pumps away the gas load from the high
vacuum pump. The foreline pump is connected to the high vacuum pump by a
130-cm hose called the foreline hose. There are four different types of foreline
pumps, the Pfeiffer DUO (Figure 26), the MVP-070-3 (Figure 27 on page 158),
the MVP-070-3C (not shown), and the IDP3 (Figure 28 on page 158). The dry
foreline pumps are not supported with diffusion pump base MSDs
Figure 26 Pfeiffer DUO foreline pump
Hose to vacuum pump
Ballast control
Fill cap
Exhaust outlet
Power switch
Oil level window
with oil mist filter
Drain plug (on front)
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