Agilent Technologies 5977B Series

158 5977B Series MSD Troubleshooting and Maintenance Manual
6 Vacuum System
Figure 27 MVP-070-3 dry foreline pump
Figure 28 IDP3 dry foreline pump
CAUTION
Agilent does not recommend using hydrogen as a carrier gas on systems equipped
with an IDP3 rough pump.
Exhaust outlet
Power switch
Hose to vacuum pump
Power cord
Exhaust filter