230 5977B Series MSD Troubleshooting and Maintenance Manual
9 Parts
Vacuum System
This section lists replacement parts available for the vacuum system. It
includes, O-rings and seals (Table 18 on page 230), standard foreline pump
and related components (Table 19 on page 231 and Figure 55 on page 232),
dry foreline pump and related components (Table 20 on page 233, Table 21 on
page 234, Figure 56 on page 233, and Figure 57 on page 235), diffusion pump
and related components (Table 22 on page 236 and Figure 58 on page 236),
and turbo pump vacuum system components (Table 23 on page 237 and
Figure 59 on page 237).
O-rings and seals
Tab le 18 O-rings and seals
Description Part number
Calibration valve O-ring (1/4-inch) 5180-4182
KF10/16 seal (foreline pump inlet), Micro-Ion vacuum
gauge
KC16AV
KF10/16 seal (foreline pump inlet and diffusion pump
outlet), Micro-Ion vacuum gauge
KC16AV
KF50 seal (diffusion pump inlet) 0100-1884
Side plate O-ring 0905-1442
Vent valve O-ring (1/4-inch) 5180-4182
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