236 5977B Series MSD Troubleshooting and Maintenance Manual
9 Parts
Diffusion pump and related parts
Tab le 22 Diffusion pump MSD vacuum system components (Figure 58)
Item Description Part number
1 Diffusion pump
120 V G1099-80500
220/240 V G1099-80501
2 Fan (for high vacuum pump) G7005-60564
3 Foreline gauge assembly G1099-60545
KF50 clamp 0100-1395
Figure 58 Diffusion pump removed from analyzer chamber connection and related parts
Diffusion pump
Foreline gauge
assembly
High vacuum fan