162 5977B Series MSD Troubleshooting and Maintenance Manual
6 Vacuum System
Analyzer Chamber
The analyzer chamber (Figure 29) is where the analyzer operates. The
manifold is extruded and machined from an aluminum alloy. Large openings
in the side, front, and rear of the analyzer chamber are closed by plates.
O-rings provide the seals between the plates and the manifold. Ports in the
manifold and the plates provide attachment points for the Micro-Ion vacuum
gauge, calibration valve, vent valve, GC/MSD interface, and high vacuum
pump.
Diffusion pump version
The diffusion pump attaches, with a KF50 seal, to a baffle adapter that is
clamped to the bottom of the manifold. A vapor baffle helps prevent migration
of pump fluid vapor into the manifold. Cooling fins on the bottom of the
manifold keep the baffle cool so the vapor will condense on it.
Turbo pump version
The turbo pump and the mounting bracket for the turbo controller are
clamped directly to the manifold.
Figure 29 Analyzer chamber
Vacuum gauge baffle
GC/MSD interface
To h ig h vacu um pu mp
Calibration and vent valves
Observation window
Side plate O-ring
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